- Research Field
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- Paper Publications
- [1] The Sintering Process and Vibration Characteristics for Leadless Package Structure of Pressure Se....Packaging and Manufacturing Technology,2022, [2] Static and dynamic analyses and multi-objective optimization of wafer thinning machine’s design ....Eng. Res. Express,2024, [3] Pd-Ni合金薄膜氢气传感器中隔离膜对性能影响与机理研究.ZRHT,2022, [4] 工作温度对Pd-Ni合金薄膜电阻氢敏性能的影响.表面技术,2023,
- Patents
- [1] 一种薄片阵列热流传感器 [2] 用于泄漏检测的压力参考装置、装配方法及压力传感器 [3] 一种氢气传感器芯体及其制备方法和氢气传感器 [4] 一种晶圆运输系统及方法 [5] 一种晶圆软件安全性测试方法及系统、设备、介质 [6] 一种晶圆加工自动监控远程服务水平的方法及系统 [7] 一种晶圆清洗方法及系统
- Published Books
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- Research Projects
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