Xia, HX; Xiang, D; Mou, P; Yang, W. Experimental study of the effects of showerhead configuration on large-area silicon-nitride thin film by plasma-enhanced chemical vapor deposition.. Thin Solid Films. 2017, Vol. 638: 1-8.
点击次数：
- 上一条：
- Dong Xiang, Huanxiong Xia, Wang Yang, Peng Mou.Parametric study and residual gas analysis of large-area silicon-nitride thin-film deposition by plasma-enhanced chemical vapor deposition. Vacuum,2019 172–178
- 下一条：
- Xiang, D; Shen, YH*; Wei, YZ; You, MX. A Comparative Study of the Dissipative Contact Force Models for Collision Under External Spring Forces. Journal Of Computational And Nonlinear Dynamics. 2018, Vol. 13, OCT. 2018: 101009-1~101009-13
