D Fang，F Zheng，B Chen，Y Wang，Y Fang，P Yang，X Wen，C Peng，S Xia. Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe effects[J]. Microsystem Technologies, 2015, 21(10):2089-2096.
发布时间：2022-04-08 点击次数：
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