Atomic Layer Deposition of the Solid Electrolyte Garnet Li7La3Zr2O12
Release time:2026-07-21
Hits:
- Impact Factor:
- 7.1
- DOI number:
- 10.1021/acs.chemmater.7b00944
- Journal:
- Chemistry of Materials
- Abstract:
- Lithium solid electrolytes are a promising platform for achieving high energy density, long-lasting, and safe rechargeable batteries, which could have widespread societal impact. In particular, the ceramic oxide garnet Li7La3Zr2O12 (LLZO) has been shown to be a promising electrolyte due to its stability and high ionic conductivity. Two major challenges for commercialization are the manufacture of thin layers and the creation of stable, low-impedance interfaces with both anode and cathode materials. Atomic layer deposition (ALD) has recently been shown to be a powerful method for depositing both solid electrolytes and interfacial layers to improve the stability and performance at electrode–electrolyte interfaces in battery systems. Herein, we present a thermal ALD process for LLZO, demonstrating the ability to tune composition within the amorphous as-deposited film, which is studied using in situ quartz crystal microbalance measurements. Postannealing using a variety of substrates and gas environments was performed, and the formation of the cubic phase was observed at temperatures as low as 555 °C, significantly lower than what is required for bulk processing. Additionally, challenges associated with achieving a dense garnet phase due to substrate reactivity, morphology changes, and Li loss under the necessary high-temperature annealing are quantified via in situ synchrotron X-ray diffraction.
- Co-author:
- Kuan-Hung Chen, Kevin N Wood, Andrew L Davis, Travis Thompson, Ashley R Bielinski, Adrian J Sanchez, Xiang Wang, Chongmin Wang, Jeff Sakamoto
- First Author:
- Eric Kazyak
- Correspondence Author:
- Neil P Dasgupta
- Discipline:
- Engineering
- Document Type:
- J
- Volume:
- 29
- Issue:
- 8
- Page Number:
- 3785-3792
- Translation or Not:
- no
- Date of Publication:
- 2018-04-25
- Included Journals:
- SCI
- Links to published journals:
- https://pubs.acs.org/doi/full/10.1021/acs.chemmater.7b00944


