Pengfei Yang, Chunrong Peng, Dongming Fang, Xiaolong Wen, Shanhong Xia. Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes. Journal of Micromechanics and Microengineering, 2013, 23(5): 055002.
Pre One:Haiyan Zhang, Chunrong Peng, Dongming Fang, Pengfei Yang, Xiaolong Wen, Shanhong Xia. Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors, Sensors, 2012, 12: 5105-5115.
Next One:杨鹏飞,闻小龙,彭春荣, 方东明, 陈博,夏善红, 郝一龙,基于MEMS技术的地面大气电场传感器系统,第十三届全国敏感元件与传感器学术会议(STC2014),中国,山西太原,2014.