北京科技大学主页平台管理系统 Xiangdong--Home-- Xia, HX; Xiang, D; Mou, P; Yang, W. Experimental study of the effects of showerhead configuration on large-area silicon-nitride thin film by plasma-enhanced chemical vapor deposition.. Thin Solid Films. 2017, Vol. 638: 1-8.

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Xiangdong

Recommended Ph.D.Supervisor

Personal Information

Supervisor of Doctorate Candidates

Name (English):Xiangdong

Name (Pinyin):xiangdong

E-Mail:

School/Department:机械工程学院

Administrative Position:机械工程学院机械制造及自动化系主任

Professional Title:Professor

Discipline:
Mechanics Manufacture and Automation

Home > Scientific Research > Paper Publications

Xia, HX; Xiang, D; Mou, P; Yang, W. Experimental study of the effects of showerhead configuration on large-area silicon-nitride thin film by plasma-enhanced chemical vapor deposition.. Thin Solid Films. 2017, Vol. 638: 1-8.

Date:2022-04-05 clicks:

Translation or Not:no

Pre One:Dong Xiang, Huanxiong Xia, Wang Yang, Peng Mou.Parametric study and residual gas analysis of large-area silicon-nitride thin-film deposition by plasma-enhanced chemical vapor deposition. Vacuum,2019 172–178 Next One:Xiang, D; Shen, YH*; Wei, YZ; You, MX. A Comparative Study of the Dissipative Contact Force Models for Collision Under External Spring Forces. Journal Of Computational And Nonlinear Dynamics. 2018, Vol. 13, OCT. 2018: 101009-1~101009-13