Xia, HX; Xiang, D; Yang, W ; Mou, P. Multi-model simulation of 300 mm silicon-nitride thin-film deposition by PECVD and experimental verification. Surface & Coatings Technology. 2017, Vol. 297: 1-10
Date:2022-04-05 clicks:
Translation or Not:no
Faculty
Xiangdong
Supervisor of Doctorate Candidates
Name (English):Xiangdong
Name (Pinyin):xiangdong
E-Mail:
School/Department:机械工程学院
Administrative Position:机械工程学院机械制造及自动化系主任
Professional Title:Professor
Discipline:
Mechanics Manufacture and Automation
Translation or Not:no