Pengfei Yang, Chunrong Peng, Dongming Fang, Xiaolong Wen, Shanhong Xia. Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes. Journal of Micromechanics and Microengineering, 2013, 23(5): 055002.
发布时间：2022-04-08 点击次数：
是否译文：否